Integrated circuit and seed layers

ABSTRACT

Structures are provided that include a conducting layer disposed on a layered arrangement of a diffusion barrier layer and a seed layer in an integrated circuit. Apparatus and systems having such structures and methods of forming these structures for apparatus and systems are disclosed.

RELATED APPLICATIONS

This application is a continuation of U.S. application Ser. No.10/789,882, filed Feb. 27, 2004, which is a divisional of U.S.application Ser. No. 10/117,041, filed Apr. 5, 2002, now U.S. Pat. No.7,105,914, which is a divisional of U.S. application Ser. No.09/484,002, filed Jan. 18, 2000, now U.S. Pat. No. 6,376,370, each ofwhich are incorporated herein by reference in their entirety.

This application is related to the following co-pending, commonlyassigned applications: U.S. application Ser. No. 09/128,859 filed Aug.4, 1998, now U.S. Pat. No. 6,284,656, U.S. application Ser. No.09/488,098, filed Jan. 18, 2000, now U.S. Pat. No. 6,429,120, and U.S.application Ser. No. 09/484,303, filed Jan. 18, 2000, now U.S. Pat. No.7,262,130, each of which are hereby incorporated by reference in theirentirety.

FIELD OF THE INVENTION

The present invention relates generally to integrated circuits. Moreparticularly, it pertains to structures and methods for providing seedlayers for integrated circuit metallurgy.

BACKGROUND OF THE INVENTION

One of the main problems confronting the semiconductor processingindustry, in the ULSI age, is that of Capacitive-Resistance loss in thewiring levels. This has led to a large effort to reduce the resistanceof and lower the capacitive loading on the wiring levels. Since itsbeginning, the industry has relied on aluminum and aluminum alloys forwiring. In a like manner, the industry has mainly relied on SiO₂ as theinsulator of choice, although polyimide was used in a number of productsby one vendor (IBM), for a number of years. The capacitive resistanceproblem grows with each succeeding generation of technology. As thedimensions decrease the minimum line space combination decreases, thusincreasing both capacitance and resistance, if the designer is to takeadvantage of the improved ground rules.

To improve the conductivity, it has been suggested by numerousinvestigators, that copper or perhaps silver or gold metallurgy besubstituted for the aluminum metallurgy, now being used. Severalpotential problems have been encountered in the development of theseproposed metallurgies. One of the main ones is the fast diffusion ofcopper through both silicon and SiO₂. This along with the known junctionpoising effects of copper and gold have led to proposals to use a liner,to separate these metallurgies from the SiO₂ insulator.

For example, an article authored by Karen Holloway and Peter M. Fryer,entitled, “Tantalum as a diffusion barrier between copper and silicon”,Appl. Phys. Letter vol. 57, No. 17, 22 Oct. 1990, pp. 1736-1738,suggests the use of a tantalum metal liner. In another article authoredby T. Laursen and J. W. Mayer, entitled, “Encapsulation of Copper byNitridation of Cu—Ti Alloy/Bilayer Structures”, International Conferenceon Metallurgical Coatings and Thin Films, San Diego, Calif., Apr. 21-25,1997, Abstract No. H1.03, pg. 309, suggests using a compound such asCuTi as the liner. Still another article published by Vee S. C. Len, R.E. Hurley, N. McCusker, D. W. McNill, B. M. Armstrong and H. S. Gamble,entitled, “An investigation into the performance of diffusion barriermaterials against copper diffusion using metal-oxide-semiconductor (MOS)capacitor structures”, Solid-State Electronics 43 (1999) pp. 1045-1049suggests using a compound such as TaN as the liner. These approaches,however, do not fully resolve the above-stated problem of the minimumline space decreases. Thus, the shrinking line size in the metal lineand liner combination again increases both the capacitance andresistance.

At the same time other investigators, in looking at the capacitiveloading effect, have been studying various polymers such as fluorinatedpolyimides as possible substitutions for SiO₂ insulators. Several ofthese materials have dielectric constants considerably lower than SiO₂.However as in the case of SiO₂, an incompatibility problem with coppermetallurgy has been found. For example, in a presentation by D. J.Godbey, L. J. Buckley, A. P. Purdy and A. W. Snow, entitled, “CopperDiffusion in Organic Polymer Resists and Inter-level Dielectrics”, atthe International Conference on Metallurgical Coatings and Thin Films,San Diego, Calif., Apr. 21-25, 1997, Abstract H2.04 pg. 313, it wasshown that polyimide, and many other polymers, react with copper duringthe curing process, forming a conductive oxide CuO₂, which is dispersedwithin the polymer. This then raises the effective dielectric constantof the polymer and in many cases increases the polymers conductivity. Inaddition it has been found that reactive ion etching (RIE) of all threemetals, copper, silver or gold, is difficult at best.

Other approaches by investigators have continued to look for ways tocontinue to use aluminum wiring with a lower dielectric constantinsulator. This would decrease the capacitive load with a giveninter-line space but require wider or thicker lines. The use of thickerlines would increase the capacitive loading in direct proportion to thethickness increase. Thus to some measure, it defeats the objectives ofdecreasing the capacitive loading effects. Therefore, the use of thickerlines should be avoided as much as possible. As the resistivity of theline is directly proportional to its cross-sectional area, if it cannotbe made thicker, it must be made wider. If however the lines are madewider, fewer wiring channels can be provided in each metal level. Toobtain the same number of wiring channels, additional levels of metalmust be provided. This increases the chip cost. So if this approach isto be followed, it is imperative that a low cost process sequence beadopted.

One approach provided by the present inventor in a co-pendingapplication, entitled, “Copper Metallurgy in Integrated Circuits”, filedAug. 4, 1998, application Ser. No. 09/128,859, proposes a method tosolve many of the problems associated with using copper in a polymerinsulator. This process, which was specifically designed to becompatible with a polymer or foam insulation, required that the unwantedcopper on the surface of each layer be removed by Chemical MechanicalPolishing (CMP) or a similar planarizing process. However, this methodmay require careful process control, leading to additional expense.Another approach is provided in a co-pending application by Kie Ahn andLeonard Forbes, entitled “Method for Making Copper and Other MetalInterconnections in Integrated Circuits”, filed Feb. 27, 1998, U.S. Ser.No. 09/032,197, which proposes a method using ionized sputtering to formthe underlayer, then forming a low wetting layer on the areas where nocopper is desired using jet vapor deposition. The copper is depositedwith ionized Magnetron sputtering followed by hydrogen annealing. Theexcess copper is then removed by CMP as in the aforementionedapplication.

Another process is described by the present inventor in a co-pendingapplication, entitled, “Integrated Circuit with Oxidation ResistantPolymeric Layer”, filed Sep. 1, 1998, U.S. Ser. No. 09/145,012, whicheliminates many of the CMP processes and uses lift-off to define thetrench and the seed layer simultaneously. A process is also described bythe present inventor in a co-pending application, entitled, “ConductiveStructures in Integrated Circuits” filed Mar. 1, 1999, U.S. Ser. No.09/259,849, which required a CMP process to remove unwanted seedmaterial prior to a selective deposition of the metal layers in adamascene or dual damascene process.

The use of CMP has proven to be effective in reducing localnon-planarity. However, extensive dishing in wide lines and rounding ofcorners of the insulator are a common occurrence. It has been found thatby maintaining a regular structure through the use of dummy structuresand small feature sizes, it is possible to planarize a level to a nearlyflat surface. The use of these techniques are however costly and in somecases come with density or performance penalties. It is, however,generally possible to planarize a structure prior to the metal levelsusing these methods with little or no density penalty. The use ofelectroless plating has been suggested in an article authored by YosiSchacham-Diamand and Valery M. Dubin, entitled “Copper electrolessdeposition technology for ultra-large scale-integration (ULSI)metallization”, Microelectronic Engineering 33 (1997) 47-58, however asimple process for obtaining both a barrier layer as well as a seedlayer is needed to improve the cost effectiveness of this technique. Onetechnique for seeding polyimide and silicon surfaces using high energy(10-20 Kilo Electron Volts {KEV}) ion implantation has been demonstratedin an article authored by S. Bhansali, D. K. Sood and R. B. Zmood,entitled “Selective electroless copper plating on silicon seeded bycopper ion implantation”, Thin Solid Films V253 (1994) pp. 391-394.However this process has not been shown to be implementable into aproduct structure where a barrier and/or adhesion layer is required.

For the reasons stated above and for others which will become apparentfrom reading the following disclosure, structures and methods are neededwhich alleviate the problems associated with via and metal linefabrication processes. These structures and methods for via and metalline fabrication must be streamlined and accommodate the demand forhigher performance in integrated circuits even as the fabrication designrules shrink.

BRIEF DESCRIPTION OF THE DRAWINGS

The following detailed description of the preferred embodiments can bestbe understood when read in conjunction with the following drawings, inwhich:

FIG. 1A-1K illustrate one embodiment of the various processing steps forforming vias and metal lines according to the teachings of the presentinvention;

FIG. 2A-2K illustrate another embodiment of the various processing stepsfor forming vias and metal lines according to the teachings of thepresent invention;

FIG. 3A-3K illustrate another embodiment of the various processing stepsfor forming vias and metal lines according to the teachings of thepresent invention;

FIG. 4A-4L illustrate another embodiment of the various processing stepsfor forming vias and metal lines according to the teachings of thepresent invention;

FIG. 5 is an illustration of an integrated circuit formed according tothe teachings of the present invention.

FIG. 6 illustrates an embodiment of a system including a portion of anintegrated circuit formed according to any of the embodiments describedin the present application.

DETAILED DESCRIPTION

In the following detailed description of the invention, reference ismade to the accompanying drawings which form a part hereof, and in whichis shown, by way of illustration, specific embodiments in which theinvention may be practiced. These embodiments are described insufficient detail to enable those skilled in the art to practice theinvention. Other embodiments may be utilized and structural, logical,and electrical changes may be made without departing from the scope ofthe present invention.

The terms wafer and substrate used in the following description includeany structure having an exposed surface with which to form theintegrated circuit (IC) structure of the invention. The term substrateis understood to include semiconductor wafers. The term substrate isalso used to refer to semiconductor structures during processing, andmay include other layers that have been fabricated thereupon. Substrateinclude doped and unhoped semiconductors, epitaxial semiconductor layerssupported by a base semiconductor or insulator, as well as othersemiconductor structures well known to one skilled in the art. The terminsulator is defined to include any material that is less electricallyconductive than the materials generally referred to as conductors bythose skilled in the art. The following detailed description is,therefore, not to be taken in a limiting sense.

What is disclosed herein is a low cost process to achieve reducedcapacitance and resistance loss in wiring levels. The present inventionrequires only one complete CMP planarizing coupled with the formation ofthe first level vias, no matter how many levels of metallurgy are used.What are essentially cleanup CMP steps on each metal level are used inone process sequence. This process can be used with an aluminum, copper,silver, gold or any other material which can subsequently beelectrolessly plated or deposited by selective CVD or any otherselective deposition process. A polyimide, other polymer or foam polymercan be used as an insulator. It can also be used with an oxide or otherinorganic insulating structure if the insulating stack is compatiblewith the metal being used. It can also be used to form air bridgestructures as well. The process uses low energy ion implantation todeposit both the adhesion and/or barrier layer along with the seedlayer. This is coupled with using the resist layer which defines thedamascene trench as the blocking layer to define the implant areas. Lowenergy implantation allows the placing of distinct layers of bothbarrier/adhesion and seed layers. The use of the same resist layers todefine both the trench and seed layers allows a low cost implementationof the process.

The structures and methods of embodiments of the present inventioninclude a diffusion barrier and a seed layer in an integrated circuitboth formed using a low energy ion implantation followed by a selectivedeposition of metal lines for the integrated circuit. According to theteachings of the present invention, the selective deposition of themetal lines avoids the need for multiple chemical mechanicalplanarization (CMP) steps. The low energy ion implantation of thepresent invention allows for the distinct placement of both thediffusion barrier and the seed layer. A residual resist can be used toremove the diffusion barrier and the seed layer from unwanted areas on awafer surface.

In particular one illustrative embodiment of the present inventionincludes a method of making a diffusion barrier and a seed layer in anintegrated circuit. The method includes patterning an insulator materialto define a number of trenches in the insulator layer opening to anumber of first level vias in a planarized surface. A barrier/adhesionlayer is deposited in the number of trenches using a low energy ionimplantation, e.g. a 100 to 800 electron volt (eV) ion implantation. Aseed layer is deposited on the barrier/adhesion layer in the number oftrenches also using the low energy ion implantation. This novelmethodology further accommodates the formation of aluminum, copper,gold, and/or silver metal interconnects.

Embodiment of a Metal Interconnect Using Copper and Polyimide

FIGS. 1A-1K illustrate a novel methodology for the formation of metalinterconnects and/or a wiring structure in an integrated circuitaccording to the teachings of the present invention. The novelmethodology includes the novel formation of a barrier/adhesion layer anda seed layer in an integrated circuit using a low energy ionimplantation. The novel methodology also encompasses a novel method ofmaking copper, silver, aluminum, or gold interconnect for an integratedcircuit.

FIG. 1A illustrates a portion of an integrated circuit structure, namelyan integrated circuit having a number of semiconductor devices formed ina substrate. FIG. 1 illustrates the structure after a device structureis formed in the substrate and the contact structure to the devicestructure is in place. One of ordinary skill in the art will understandupon reading this disclosure the manner in which a number ofsemiconductor structures, e.g. transistors, can be formed in asubstrate. One of ordinary skill in the art will also understand uponreading this disclosure the manner in which a contact structure can beformed connecting to a given semiconductor device in a substrate. Forexample, FIG. 1A illustrates the structure after a number of devicestructures, e.g. transistor 101A and 101B are formed in the substrate100. An insulator layer 102 is deposited over the number ofsemiconductors 101A and 101B. The deposition of the insulator layer 102can include depositing a layer of Si₃N₄ having a thickness in the rangeof 100 to 500 Angstroms (Å). This insulator layer will also serve as anadditional barrier to impurities coming from subsequent processingsteps. Contact holes 105A and 105B are opened to the number of devicestructures 101A and 101B using a photolithography technique. One ofordinary skill in the are will understand, upon reading this disclosure,the manner in which a photolithography technique can be used to createcontact holes 105A and 105B. In one embodiment of the present inventiona titanium silicide liner 106A and 106B is placed in the contact holes105A and 105B, such a through a process such as chemical vapordeposition (CVD). Next, tungsten vias 107A and 107B can be deposited inthe contact holes 105A and 105B. The tungsten vias 107A and 107B can bedeposited in the contact holes using any suitable technique such asusing a CVD process. The excess tungsten is then removed from the wafersurface by chemical mechanical planarization (CMP) or other suitableprocesses to form a planarized surface 109.

As shown in FIG. 1B, a first polymer layer 108, or first layer ofpolyimide 108, is deposited over the wafer surface. The first polymerlayer 108 may be deposited using, for example, the process and materialdescribed in co-pending and commonly assigned application U.S. Ser. No.09/128,859, entitled “Copper Metallurgy in Integrated Circuits,” whichis hereby incorporated by reference. In one embodiment, depositing afirst polymer layer 108 includes depositing a foamed polymer layer 108.In one embodiment, the first layer of polyimide 108 is deposited andcured, forming a 5000 Å thick layer of polymer 108 after curing. As oneof ordinary skill in the art will understand, upon reading thisdisclosure, other suitable thickness for the first layer of polyimide108, or insulator layer/material 108, may also be deposited as suitedfor forming a first level metal pattern, the invention is not solimited. The first layer of polyimide 108, or first insulatorlayer/material 108 is patterned to define a number of trenches 110 inthe first insulator layer 108 opening to a number of first level vias,e.g. tungsten vias 107A and 107B in planarized surface 109. In otherwords, a first level metal pattern 110 is defined in a mask layer ofphotoresist 112 and then the first layer of polyimide 108 is etched,using any suitable process, e.g. reactive ion etching (RIE), such thatthe first level metal pattern 110 is defined in the polyimide. Accordingto the teachings of the present invention, a residual photoresist layer112 is left in place on the first insulator layer 108 in a number ofregion 113 outside of the number trenches 110. The structure is now asappears in FIG. 1B.

As shown in FIG. 1C, a first barrier/adhesion layer 114 is deposited inthe number of trenches 110 using a low energy ion implantation. In oneembodiment according to the teachings of the present invention,depositing the barrier/adhesion layer 114 includes depositing a layer ofzirconium 114 having a thickness of approximately 5 to 100 Å. Inalternate embodiments, depositing the barrier/adhesion layer 114includes depositing a barrier/adhesion layer 114 of titanium and/orhafnium. In one embodiment, depositing the depositing a layer ofzirconium 114 includes depositing a layer of zirconium 114 having athickness of approximately 50 Å. This can be achieved using a 10¹⁷ ionimplant of zirconium, i.e. 10¹⁷ ions of zirconium per square centimeter(cm²). According to the teachings of the present invention, the layer ofzirconium 114 is implanted at 100 electron volts (eV) into the surfaceof the trenches 110 in the polymer layer 108 using a varying angleimplant (∞), as represented by arrows 111, where the angle ofimplantation is changed from normal to the wafer surface to 15 degreesoff normal. As one of ordinary skill in the art will understand uponreading this disclosure, using a varying angle implant, where an angleof implantation is changed from normal to the planarized surface 109 toapproximately 15 degrees off normal deposits the barrier/adhesion layer114 on all surfaces in the number of trenches 110. The structure is nowas appears in FIG. 1C.

In FIG. 1D, a first seed layer 116 is deposited on the firstbarrier/adhesion layer 114 using a low energy ion implantation.According to the broader teachings of the present invention, depositingthe seed layer 116 on the barrier/adhesion layer 114 includes depositinga seed layer 116 selected from the group consisting of aluminum, copper,silver, and gold. However, according to the teachings of the presentembodiment, depositing the seed layer 116 includes depositing a layer ofcopper 116 having a thickness of approximately a 100 Å. This can beachieved using an 8×10¹⁶ ion implant of copper. According to theteachings of the present invention, using a low energy ion implantationincludes implanting the layer of copper 116 at 100 electron volts (eV)into the surface of the trenches 110 in the polymer layer. Also thelayer of copper 116 is implanted at an angle normal to the wafer'ssurface, as shown by arrows 115. As one of ordinary skill in the artwill understand upon reading this disclosure, implanting the layer ofcopper 116 at an angle normal to the planarized surface results in theseed layer of copper 116 remaining on a bottom surface 118 in the numberof trenches 110 and to a much lesser extent on the side surfaces 117 ofthe number of trenches 110. In one embodiment, an optional layer ofaluminum 121 is deposited over the copper seed layer 116 again using alow energy ion implantation of 100 electron volts (eV). The optionallayer of aluminum 121 is deposited to have a thickness of approximatelya 50 Å. This can be achieved using a 3×10¹⁶ ion implant of aluminumnormal to the wafer surface. As one of ordinary skill in the art willunderstand upon reading this disclosure, the layer of aluminum 121 isused to protect the copper seed layer 116 from oxidation prior tosubsequent processing steps. The structure is now as shown in FIG. 1D.

FIG. 1E illustrates the structure after the next sequence of processsteps. As one of ordinary skill in the art will understand upon readingthis disclosure, the residual photoresist layer 112 has served as ablocking layer to define the implant areas for the barrier/adhesionlayer 114, the seed layer 116, and the layer of aluminum 121. Theresidual photoresist layer 112 is now removed using a wet strip process,as the same will be understood by one of ordinary skill in the art uponreading this disclosure. According to the teachings of the presentinvention, removing the residual photoresist layer 112 includes removingthe unwanted aluminum layer 121, the unwanted seed layer 116, and theunwanted barrier/adhesion layer 114 from other areas of the wafer'ssurface, e.g., from over a number of regions 113 outside of the trenches110 on a top surface 119 of the first insulator layer 108. The structureis now as shown in FIG. 1E.

In FIG. 1F, a metallic conductor 120, or number of first level metallines 120, is deposited over the seed layer 116 in the number oftrenches 110. According to teachings of the present invention, metallicconductor 120, or number of first level metal lines 120, is selectedfrom the group consisting of aluminum, copper, silver, and golddepending on the type of seed layer 116 which was deposited. Accordingto this embodiment, the metallic conductor 120, or number of first levelmetal lines 120 are selectively formed on the copper seed layer 116 suchthat the number of copper metal lines 120, or first level copper metallines 120 are not formed on the top surface 119 of the first insulatorlayer 108. In one embodiment, the metallic conductor 120, or number offirst level metal lines 120, is deposited using a selective CVD process.In another embodiment, depositing a metallic conductor 120, or number offirst level metal lines 120, over the seed layer 116 includes depositinga metallic conductor 120 using electroless plating. Electroless copperplating is used to deposit sufficient copper to fill the number oftrenches 110 to the top surface 119 of the first insulator layer 108.

As shown in FIG. 1G, the process sequence may be continued to form anynumber of subsequent metal layers in a multilayer wiring structure. FIG.1G illustrates the structure after the next sequence of processingsteps. In FIG. 1G, a dual damascene process is used to define and fill afirst to a second level of vias and a second level metallurgy. To do so,a second polymer layer 124, or second layer of polyimide 124, isdeposited over the wafer surface, e.g. the metallic conductor 120, ornumber of first level metal lines 120, and the first polymer layer 108.The second polymer layer 124 may similarly be deposited using, forexample, the process and material described in co-pending and commonlyassigned application U.S. Ser. No. 09/128,859, entitled “CopperMetallurgy in Integrated Circuits,” which is hereby incorporated byreference. In one embodiment, depositing a second polymer layer 124includes depositing a foamed second polymer layer 124. In oneembodiment, the second polymer layer 124 is deposited and cured, forminga 10,000 Å thick second polymer layer 124 after curing. As one ofordinary skill in the art will understand, upon reading this disclosure,other suitable thickness for the second polymer layer 124, or secondinsulator layer/material 124, may also be deposited as suited forforming a first to a second level of vias, e.g. second level vias, and anumber of second level metal lines, the invention is not so limited. Thesecond polymer layer 124, or second insulator layer/material 124 ispatterned to define a second level of vias and a number of second levelmetal lines in the second insulator layer/material 124 opening to themetallic conductor 120, or number of first level metal lines 120. Inother words, a second level of vias is defined in a second mask layer ofphotoresist 126 and then the second polymer layer 124 is etched, usingany suitable process, e.g. reactive ion etching (RIE), such that asecond level of via openings 128 are defined in the polyimide. Using thedual damascene process, a number of second level metal lines are alsodefined in a second mask layer of photoresist 126 and the second polymerlayer 124 is again etched, using any suitable process, e.g. reactive ionetching (RIE), such that a second level of metal line trenches 130 aredefined in the polyimide. One of ordinary skill in the art willunderstand upon reading this disclosure, the manner in which aphotoresist layer 126 can be mask, exposed, and developed using a dualdamascene process to pattern a second level of via openings 128 and asecond level of metal line trenches 130 in the second insulatorlayer/material 124.

As described previously, and according to the teachings of the presentinvention, a residual photoresist layer 126 is left in place on thesecond insulator layer/material 124 in a number of regions 132 outsideof the second level of metal line trenches 130. A suitable plasma and/orwet cleaning process is used to remove any contaminates from the secondlevel of via openings 128 and a second level of metal line trenches 130,as the same will be understood by one of ordinary skill in the art uponreading this disclosure. The structure is now as appears in FIG. 1G.

FIG. 1H illustrates the structure 100 after the next sequence ofprocessing steps. In FIG. 1H, a second barrier/adhesion layer 134 isdeposited in the second level of via openings 128 and a second level ofmetal line trenches 130 using a low energy ion implantation. Asdescribed above, in one embodiment according to the teachings of thepresent invention, depositing the second barrier/adhesion layer 134includes depositing a layer of zirconium 134 having a thickness ofapproximately 5 to 100 Å. In alternate embodiments, depositing thesecond barrier/adhesion layer 134 includes depositing a barrier/adhesionlayer 134 of titanium and/or hafnium. In one embodiment, depositing thelayer of zirconium 134 includes depositing a layer of zirconium 134having a thickness of approximately 50 Å. In one embodiment, this isachieved using a 10¹⁷ ion implant of zirconium. According to theteachings of the present invention, the layer of zirconium 134 isimplanted at 100 electron volts (eV) into the surface of the secondlevel of via openings 128 and a second level of metal line trenches 130in the second polymer layer 124 using a varying angle, as shown byarrows 125, implant where the angle of implantation is changed fromnormal to the wafer surface to 15 degrees off normal. As one of ordinaryskill in the art will understand upon reading this disclosure, using avarying angle implant, where an angle of implantation is changed fromnormal to the wafer surface to approximately 15 degrees off normaldeposits the barrier/adhesion layer 134 on all surfaces in the secondlevel of via openings 128 and a second level of metal line trenches 130.The structure is now as appears in FIG. 1H.

FIG. 1I illustrates the structure 100 after the next sequence ofprocessing steps. In FIG. 1I, a second seed layer 136 is deposited onthe second barrier/adhesion layer 134 using a low energy ionimplantation. According to the broader teachings of the presentinvention, depositing the second seed layer 136 on the secondbarrier/adhesion layer 114 includes depositing a second seed layer 136selected from the group consisting of aluminum, copper, silver, andgold. However, according to the teachings of the present embodiment,depositing the second seed layer 136 includes depositing a second layerof copper 136 having a thickness of approximately a 100 Å. In oneembodiment, this is achieved using an 8×10¹⁶ ion implant of copper.According to the teachings of the present invention, using a low energyion implantation includes implanting the layer of copper 136 at 100electron volts (eV) into the surfaces of the second level of viaopenings 128 and the polymer layer. Also the layer of copper 136 isimplanted at an angle normal to the wafer's surface as shown by arrows137. As one of ordinary skill in the art will understand upon readingthis disclosure, implanting the layer of copper 136 at an angle normalto the planarized surface results in the second seed layer of copper 136remaining on a bottom surface 138 in the second level of via openings128 and second level of metal line trenches 130 and to a much lesserextent on the side surfaces 140 of the second level of via openings 128and a second level of metal line trenches 130. In one embodiment, anoptional layer of aluminum 141 is deposited over the second copper seedlayer 136 again using a low energy ion implantation of 100 electronvolts (eV). The optional layer of aluminum is deposited to have athickness of approximately a 50 Å. In one embodiment, this is achievedusing a 3×10¹⁶ ion implant of aluminum normal to the wafer surface. Asone of ordinary skill in the art will understand upon reading thisdisclosure, the layer of aluminum 141 is used to protect the secondcopper seed layer 136 from oxidation prior to subsequent processingsteps.

FIG. 1J illustrates the structure after the next sequence of processingsteps. As one of ordinary skill in the art will understand upon readingthis disclosure, the residual photoresist layer 126 has served as ablocking layer to define the implant areas for the secondbarrier/adhesion layer 134, the second seed layer 136, and the aluminumlayer 141. The residual photoresist layer 126 is now removed using a wetstrip process, as the same will be understood by one of ordinary skillin the art upon reading this disclosure. According to the teachings ofthe present invention, removing the residual photoresist layer 126includes removing the unwanted aluminum layer 141, the unwanted seedlayer 136, and the unwanted barrier/adhesion layer 134 from other areasof the wafer's surface, e.g. from over a number of regions 132 outsideof second level of metal line trenches 130 on a top surface 142 of thesecond insulator layer 124. The structure is now as shown in FIG. 1J.

In FIG. 1K, a second metallic conductor 144, or second core conductor144, is deposited over or formed on the second seed layer 136 and withinthe second barrier/adhesion layer 134 in the second level of viaopenings 128 and the second level of metal line trenches 130 in thepolymer layer. In this embodiment the second metallic conductor 144, orsecond core conductor 144, is copper, but in other embodiments of thepresent invention can be selected from the group consisting of aluminum,silver, and gold. In one embodiment, the second metallic conductor 144,or second core conductor 144, is deposited using a selective CVD processsuch that the second metallic conductor 144, or second core conductor144 is not formed on a top surface 142 of the second insulator layer124. In another embodiment, depositing a second metallic conductor 144,or second core conductor 144, over on the second seed layer 136 andwithin the second barrier/adhesion layer 134 includes depositing asecond metallic conductor 144, or second core conductor 144, usingelectroless plating. Electroless copper plating is used to depositsufficient copper to fill the second level of via openings 128 and thesecond level of metal line trenches 130 to the top surface 142 of thesecond insulator layer 124. Thus, the second barrier/adhesion layer 134,the second seed layer 136, and the second metallic conductor 144, orsecond core conductor 144, constitute a second number of conductivestructures which includes a number of second level vias and a number ofsecond level metal lines which are formed over and connect to a firstnumber of conductive structures, e.g. the first level metal lines 120.

Embodiment of a Metal Interconnect Using Aluminum Metal Lines and OxideInsulators

FIGS. 2A-2K illustrate a novel methodology for the formation of metalinterconnects and/or a wiring structure in an integrated circuitaccording to the teachings of the present invention. The novelmethodology includes the novel formation of a barrier/adhesion layer anda seed layer in an integrated circuit using a low energy ionimplantation. The novel methodology also encompasses a novel method ofmaking copper, silver, aluminum, or gold interconnect for an integratedcircuit.

FIG. 2A illustrates a portion of an integrated circuit structure, namelyan integrated circuit having a number of semiconductor devices formed ina substrate as described above in connection with FIG. 1A. That is, FIG.2A illustrates the structure after a device structure is formed in thesubstrate and the contact structure to the device structure is in place.Like FIG. 1A, FIG. 2A illustrates the structure after a number of devicestructures, e.g. transistor 201A and 201B are formed in the substrate200. An insulator layer 202 is deposited over the number ofsemiconductors 201A and 201B. The deposition of the insulator layer 202can include depositing a layer of Si₃N₄ having a thickness in the rangeof 100 to 500 Angstroms (Å). This insulator layer will also serve as anadditional barrier to impurities coming from subsequent processingsteps. Contact holes 205A and 205B are opened to the number of devicestructures 201A and 201B using a photolithography technique. One ofordinary skill in the are will understand, upon reading this disclosure,the manner in which a photolithography technique can be used to createcontact holes 205A and 205B. In one embodiment of the present inventiona titanium silicide liner 206A and 206B is placed in the contact holes205A and 205B, such a through a process such as chemical vapordeposition (CVD). Next, tungsten vias 207A and 207B can be deposited inthe contact holes 205A and 205B. The tungsten vias 207A and 207B can bedeposited in the contact holes using any suitable technique such asusing a CVD process. The excess tungsten is then removed from the wafersurface by chemical mechanical planarization (CMP) or other suitableprocesses to form a planarized surface 209.

As shown in FIG. 2B, a first oxide layer 208, e.g. a silicon dioxidelayer (SiO₂), is deposited over the wafer surface. In one embodiment,depositing a first oxide layer 208 includes depositing a fluorinatedsilicon oxide layer 208. The first oxide layer 208 may be depositedusing any suitable technique, such as, for example, using a CVD process.In one embodiment, depositing a first oxide layer 208 having a thicknessof approximately 5000 Å. As one of ordinary skill in the art willunderstand, upon reading this disclosure, other suitable thicknesses forthe first oxide layer 208 may also be deposited as suited for forming afirst level metal pattern, the invention is not so limited. The firstoxide layer 208 is patterned to define a number of trenches 210 in thefirst oxide layer 208 opening to a number of first level vias, e.g.tungsten vias 207A and 207B in planarized surface 209. In other words, afirst level metal pattern 210 is defined in a mask layer of photoresist212 and then the first oxide layer 208 is etched, using any suitableprocess, e.g. reactive ion etching (RIE), such that the first levelmetal pattern 210 is defined in the first oxide layer 208. One ofordinary skill in the art will understand upon reading this disclosurethat any desired first level metal pattern 210 can be created using aphotolithography technique. According to the teachings of the presentinvention, a residual photoresist layer 212 is left in place on thefirst oxide layer 208 in a number of region 213 outside of the numbertrenches 210. The structure is now as appears in FIG. 2B.

As shown in FIG. 2C, a first barrier/adhesion layer 214 is deposited inthe number of trenches 210 using a low energy ion implantation. In oneembodiment according to the teachings of the present invention,depositing the barrier/adhesion layer 214 includes depositing a layer ofzirconium 214 having a thickness of approximately 5 to 100 Å. Inalternate embodiments, depositing the barrier/adhesion layer 214includes depositing a barrier/adhesion layer 214 of titanium and/orhafnium. In one embodiment, depositing the depositing a layer ofzirconium 214 includes depositing a layer of zirconium 214 having athickness of approximately 50 Å. This can be achieved using a 10¹⁷ ionimplant of zirconium. According to the teachings of the presentinvention, the layer of zirconium 214 is implanted at 100 electron volts(eV) into the surface of the trenches 210 in the first oxide layer 208using a varying angle implant (∞), as represented by arrows 211, wherethe angle of implantation is changed from normal to the wafer surface to15 degrees off normal. As one of ordinary skill in the art willunderstand upon reading this disclosure, using a varying angle implant,where an angle of implantation (∞) is changed from normal to the wafer'ssurface to approximately 15 degrees off normal deposits thebarrier/adhesion layer 214 on all surfaces in the number of trenches210. The structure is now as appears in FIG. 2C.

In FIG. 2D, a first seed layer 216 is deposited on the firstbarrier/adhesion layer 214 using a low energy ion implantation.According to the broader teachings of the present invention, depositingthe seed layer 216 on the barrier/adhesion layer 214 includes depositinga first seed layer 216 selected from the group consisting of aluminum,copper, silver, and gold. However, according to the teachings of thepresent embodiment, depositing the seed layer 216 includes depositing alayer of an aluminum copper alloy 216 having a thickness ofapproximately 110 Å. This can be achieved by depositing a first layer ofaluminum 281 on the barrier/adhesion layer 214 to a thickness ofapproximately 50 Å using a low energy ion implantation of approximately100 electron volts (eV). A layer of copper 282 is then deposited on thefirst layer of aluminum 281 to a thickness of approximately 10 Å using alow energy ion implantation of approximately 100 eV. A second layer ofaluminum 283 is then deposited on the layer of copper 282 to a thicknessof approximately 50 Å using a low energy ion implantation ofapproximately 100 eV. Also the first seed layer 216 is implanted at anangle normal to the planarized surface, as shown by arrows 215. As oneof ordinary skill in the art will understand upon reading thisdisclosure, implanting the first seed layer 216 at an angle normal tothe planarized surface results in the first seed layer 216 remaining ona bottom surface 218 in the number of trenches 210 and to a much lesserextent on the side surfaces 217 of the number of trenches 210.

FIG. 2E illustrates the structure after the next sequence of processingsteps. As one of ordinary skill in the art will understand upon readingthis disclosure, the residual photoresist layer 212 has served as ablocking layer to define the implant areas for the barrier/adhesionlayer 214 and the seed layer 216. The residual photoresist layer 212 isnow removed using a wet strip process, as the same will be understood byone of ordinary skill in the art upon reading this disclosure. Accordingto the teachings of the present invention, removing the residualphotoresist layer 212 includes removing the unwanted seed layer 216 andthe unwanted barrier/adhesion layer 214 from other areas of the wafer'ssurface, e.g. from over a number of regions 213 outside of the trenches210 on a top surface 219 of the first insulator layer 208. The structureis now as shown in FIG. 2E.

In FIG. 2F, a metallic conductor 220, or number of first level metallines 220, is deposited over the first seed layer 216 and within thefirst barrier/adhesion layer 214 in the number of trenches 210. In thisembodiment, the metallic conductor 220, or number of first level metallines 220, is aluminum, but in other embodiments of the presentinvention the metallic conductor 220, or number of first level metallines 220, is selected from the group consisting of copper, silver, andgold depending on the type of seed layer 216 which was deposited. In oneembodiment, the metallic conductor 220, or number of first level metallines 220, is deposited using a selective CVD process. In anotherembodiment, depositing a metallic conductor 220, or number of firstlevel metal lines 220, over the seed layer 216 includes depositing ametallic conductor 220 using electroless plating. According to theteachings of the present invention the number of first level aluminummetal lines 220, is deposited to fill the number of trenches 210 to thetop surface 219 of the first oxide layer 208. Thus, the first levelaluminum metal lines 220, the first seed layer 216, and the firstbarrier/adhesion layer 214 in the number of trenches 210 constitute afirst number of conductive structures. The copper composition of thefirst seed layer 216 can be adjusted to give the appropriate percentageof copper in the completed first number of conductive structures. Forexample, in the above described embodiment the layer thicknesses of thealuminum copper sandwich was designed to give a 0.7 weight percent ofcopper in the first number of conductive structures.

As shown in FIG. 2G, the process sequence may be continued to form anynumber of subsequent metal layers in a multilayer wiring structure. FIG.2G illustrates the structure after the next sequence of processingsteps. In FIG. 2G, a dual damascene process is used to define and fill afirst to a second level of vias and a second level metallurgy. To do so,a second oxide layer 224 is deposited over the wafer surface, e.g. themetallic conductor 220, or number of first level metal lines 220, andthe first oxide layer 208. In one embodiment, depositing a second oxidelayer 224 includes depositing a second fluorinated silicon oxide layer224. In one embodiment, the second oxide layer 224 is formed to have athickness of approximately 10,000 Å. As one of ordinary skill in the artwill understand, upon reading this disclosure, other suitable thicknessfor the second oxide layer 224 may also be deposited as suited forforming a first to a second level of vias, e.g. second level vias, and anumber of second level metal lines, the invention is not so limited. Thesecond oxide layer 224 is patterned to define a second level of vias anda number of second level metal lines in the second oxide layer 224opening to the metallic conductor 220, or number of first level metallines 220. In other words, a second level of vias is defined in a secondmask layer of photoresist 226 and then the second oxide layer 224 isetched, using any suitable process, e.g. reactive ion etching (RIE),such that a second level of via openings 228 are defined in thepolyimide. Using the dual damascene process, a number of second levelmetal lines are also defined in a second mask layer of photoresist 226and the second oxide layer 224 is again etched, using any suitableprocess, e.g. reactive ion etching (RIE), such that a second level ofmetal line trenches 230 are defined in the second oxide layer 224. Oneof ordinary skill in the art will understand upon reading thisdisclosure, the manner in which a photoresist layer 226 can be mask,exposed, and developed using a dual damascene process to pattern asecond level of via openings 228 and a second level of metal linetrenches 230 in the second oxide layer 224.

As described previously, and according to the teachings of the presentinvention, a residual photoresist layer 226 is left in place on thesecond oxide layer 224 in a number of regions 232 outside of the secondlevel of metal line trenches 230. A suitable plasma and/or wet cleaningprocess is used to remove any contaminates from the second level of viaopenings 228 and a second level of metal line trenches 230, as the samewill be understood by one of ordinary skill in the art upon reading thisdisclosure. The structure is now as appears in FIG. 2G.

FIG. 2H illustrates the structure after the next sequence of processingsteps. In FIG. 2H, a second barrier/adhesion layer 234 is deposited inthe second level of via openings 228 and a second level of metal linetrenches 230 using a low energy ion implantation. As described above, inone embodiment according to the teachings of the present invention,depositing the second barrier/adhesion layer 234 includes depositing alayer of zirconium 234 having a thickness of approximately 5 to 100 Å.In alternate embodiments, depositing the second barrier/adhesion layer234 includes depositing a barrier/adhesion layer 234 of titanium and/orhafnium. In one embodiment, depositing the layer of zirconium 234includes depositing a layer of zirconium 234 having a thickness ofapproximately 50 Å. In one embodiment, this is achieved using a 10¹⁷ ionimplant of zirconium (that is 10¹⁷ ions per square centimeter).According to the teachings of the present invention, the layer ofzirconium 234 is implanted at 100 electron volts (eV) into the surfaceof the second level of via openings 228 and a second level of metal linetrenches 230 in the second polymer layer 224 using a varying angleimplant (∞), as shown by arrows 225 where the angle of implantation ischanged from normal to the wafer surface to 15 degrees off normal. Asone of ordinary skill in the art will understand upon reading thisdisclosure, using a varying angle implant, where an angle ofimplantation, ∞, is changed from normal to the wafer surface toapproximately 15 degrees off normal deposits the barrier/adhesion layer234 on all surfaces in the second level of via openings 228 and a secondlevel of metal line trenches 230. The structure is now as appears inFIG. 2H.

FIG. 2I illustrates the structure after the next sequence of processingsteps. In FIG. 2I, a second seed layer 236 is deposited on the secondbarrier/adhesion layer 234 using a low energy ion implantation.According to the broader teachings of the present invention, depositingthe second seed layer 236 on the second barrier/adhesion layer 214includes depositing a second seed layer 236 selected from the groupconsisting of aluminum, copper, silver, and gold. However, according tothe teachings of the present embodiment, depositing the seed layer 216includes depositing a layer of an aluminum copper alloy 216 having athickness of approximately 110 Å. This can be achieved by depositing afirst layer of aluminum 284 on the barrier/adhesion layer 214 to athickness of approximately 50 Å using a low energy ion implantation ofapproximately 100 electron volts (eV). A layer of copper 285 is thendeposited on the first layer of aluminum 284 to a thickness ofapproximately 10 Å using a low energy ion implantation of approximately100 eV. A second layer of aluminum 286 is then deposited on the layer ofcopper 285 to a thickness of approximately 50 Å using a low energy ionimplantation of approximately 100 eV. Also the first seed layer 216 isimplanted at an angle normal to the wafer's surface as shown by arrows237. As one of ordinary skill in the art will understand upon readingthis disclosure, implanting the layer of copper 236 at an angle normalto the planarized surface results in the second seed layer of copper 236remaining on a bottom surface 238 in the second level of via openings228 and to a much lesser extent on the side surfaces 240 of the secondlevel of via openings 228 and a second level of metal line trenches 230.

FIG. 2J illustrates the structure following the next sequence of processsteps. As one of ordinary skill in the art will understand upon readingthis disclosure, the residual photoresist layer 226 has served as ablocking layer to define the implant areas for the secondbarrier/adhesion layer 234 and the second seed layer 236. The residualphotoresist layer 226 is now removed using a wet strip process, as thesame will be understood by one of ordinary skill in the art upon readingthis disclosure. According to the teachings of the present invention,removing the residual photoresist layer 226 includes removing theunwanted barrier/adhesion layer 234 and the unwanted second seed layer236, from other areas of the wafer's surface, e.g. from over a number ofregions 232 outside of second level of metal line trenches 230 on a topsurface 242 of the second oxide layer 224. The structure is now as shownin FIG. 2J.

In FIG. 2K, a second metallic conductor 244, or second core conductor244, is deposited over or formed on the second seed layer 236 and withinthe second barrier/adhesion layer 234 in the second level of viaopenings 228 and the second level of metal line trenches 230 in thepolymer layer. In this embodiment the second metallic conductor 244, orsecond core conductor 244, is aluminum, but in other embodiments of thepresent invention the second metallic conductor 244, or second coreconductor 244, can be selected from the group consisting of copper,silver, and gold. In one embodiment, the second metallic conductor 244,or second core conductor 244, is deposited using a selective CVDprocess. In another embodiment, depositing a second metallic conductor244, or second core conductor 244, over on the second seed layer 236 andwithin the second barrier/adhesion layer 234 includes depositing asecond metallic conductor 244, or second core conductor 244, usingelectroless plating. The second aluminum conductor 244, or second coreconductor 244 is deposited to fill the second level of via openings 228and the second level of metal line trenches 230 to the top surface 242of the second insulator layer 224. Thus, the second barrier/adhesionlayer 234, the second seed layer 236, and the second metallic conductor244, or second core conductor 244, constitute a second number ofconductive structures which includes a number of second level vias and anumber of second level metal lines which are formed over and connect toa first number of conductive structures, e.g. the first level of vias207A and 207B.

Embodiment of a Metal Interconnect Using Copper Metal Lines and OxideInsulators

FIGS. 3A-3K illustrate a novel methodology for the formation of metalinterconnects and/or a wiring structure in an integrated circuitaccording to the teachings of the present invention. The novelmethodology includes the novel formation of a barrier/adhesion layer anda seed layer in an integrated circuit using a low energy ionimplantation. The novel methodology also encompasses a novel method ofmaking copper, silver, aluminum, or gold interconnect for an integratedcircuit.

FIG. 3A illustrates a portion of an integrated circuit structure, namelyan integrated circuit having a number of semiconductor devices formed ina substrate. FIG. 3 illustrates the structure after a device structureis formed in the substrate and the contact structure to the devicestructure is in place. One of ordinary skill in the art will understandupon reading this disclosure the manner in which a number ofsemiconductor structures, e.g. transistors, can be formed in asubstrate. One of ordinary skill in the art will also understand uponreading this disclosure the manner in which a contact structure can beformed connecting to a given semiconductor device in a substrate, suchas explained in connection with FIG. 1A. For example, FIG. 3Aillustrates the structure after a number of device structures, e.g.transistor 301A and 301B are formed in the substrate 300. An insulatorlayer 302 is deposited over the number of semiconductors 301A and 301B.The deposition of the insulator layer 302 can include depositing a layerof Si₃N₄ having a thickness in the range of 100 to 500 Angstroms (Å).This insulator layer will also serve as an additional barrier toimpurities coming from subsequent processing steps. Contact holes 305Aand 305B are opened to the number of device structures 301A and 301Busing a photolithography technique. One of ordinary skill in the arewill understand, upon reading this disclosure, the manner in which aphotolithography technique can be used to create contact holes 305A and305B. In one embodiment of the present invention a titanium silicideliner 306A and 306B is placed in the contact holes 305A and 305B, such athrough a process such as chemical vapor deposition (CVD). Next,tungsten vias 306A and 306B can be deposited in the contact holes 305Aand 305B. The tungsten vias 307A and 307B can be deposited in thecontact holes using any suitable technique such as using a CVD process.The excess tungsten is then removed from the wafer surface by chemicalmechanical planarization (CMP) or other suitable processes to form aplanarized surface 309.

As shown in FIG. 3B, a first polymer layer 308, or first layer ofpolyimide 308, is deposited over the wafer surface. The first oxidelayer 308 may be deposited using any suitable technique such as, forexample, a CVD process. In one embodiment, depositing a first oxidelayer 308 includes depositing a fluorinated silicon oxide layer 308. Inone embodiment, the first oxide layer 308 is deposited to have athickness of approximately 5000 Å. As one of ordinary skill in the artwill understand, upon reading this disclosure, other suitable thicknessfor the first oxide layer 308 may also be deposited as suited forforming a first level metal pattern, the invention is not so limited.The first oxide layer 308 is patterned to define a number of trenches310 in the first oxide layer 308 opening to a number of first levelvias, e.g. tungsten vias 307A and 307B in planarized surface 309. Inother words, a first level metal pattern 310 is defined in a mask layerof photoresist 312 and then the first oxide layer 308 is etched, usingany suitable process, e.g. reactive ion etching (RIE), such that thefirst level metal pattern 310 is defined in the first oxide layer 308.According to the teachings of the present invention, a residualphotoresist layer 312 is left in place on the first oxide layer 308 in anumber of region 313 outside of the number trenches 310. The structureis now as appears in FIG. 3B.

As shown in FIG. 3C, a first barrier/adhesion layer 314 is deposited inthe number of trenches 310 using a low energy ion implantation. In oneembodiment according to the teachings of the present invention,depositing the barrier/adhesion layer 314 includes depositing a tantalumnitride layer 314 having a thickness of approximately 5 to 100 Å. Inalternate embodiments, depositing the barrier/adhesion layer 314includes depositing a barrier/adhesion layer 314 of tantalum and/orCuTi. In one embodiment, depositing the tantalum nitride layer 314includes first depositing a layer of tantalum 381 to have a thickness ofapproximately 100 Å using a low energy ion implantation of approximately100 electron volts (eV) at a varying angle implant (∞), e.g. the angleof implantation (∞) is changed from normal to the planarized surface 309to approximately 15 degrees off normal as shown by arrows 311. In oneembodiment, this is achieved using a 10¹⁷ ion implant of tantalum. Next,according to the teachings of the present invention, a layer of nitrogen382 is implanted at 700 electron volts (eV) into the layer of tantalum381. In one embodiment, this is achieved using an 8×10¹⁶ ion implant ofnitrogen. As one of ordinary skill in the art will understand uponreading this disclosure, using a varying angle implant, where an angleof implantation is changed from normal to the planarized surface 309 toapproximately 15 degrees off normal deposits the barrier/adhesion layer314 on all surfaces in the number of trenches 310. The structure is nowas appears in FIG. 3C.

In FIG. 3D, a first seed layer 316 is deposited on the firstbarrier/adhesion layer 314 using a low energy ion implantation.According to the broader teachings of the present invention, depositingthe seed layer 316 on the barrier/adhesion layer 314 includes depositinga seed layer 316 selected from the group consisting of aluminum, copper,silver, and gold. However, according to the teachings of the presentembodiment, depositing the seed layer 316 includes depositing a layer ofcopper 316 having a thickness of approximately 50 Å. This can beachieved using an 8×10¹⁶ ion implant of copper. According to theteachings of the present invention, using a low energy ion implantationincludes implanting the layer of copper 316 at 100 electron volts (eV)into the first barrier/adhesion layer 314. Also the layer of copper 316is implanted at an angle normal to the planarized surface 309 as shownby arrows 315. As one of ordinary skill in the art will understand uponreading this disclosure, implanting the layer of copper 316 at an anglenormal to the planarized surface results in the seed layer of copper 316remaining on a bottom surface 318 in the number of trenches 310 and to amuch lesser extent on the side surfaces 320 of the number of trenches310. In one embodiment, an optional layer of aluminum 321 is depositedover the copper seed layer 316 again using a low energy ion implantationof 100 electron volts (eV). The optional layer of aluminum 321 isdeposited to have a thickness of approximately a 50 Å. This can beachieved using a 3×10¹⁶ ion implant of aluminum normal to the wafersurface. As one of ordinary skill in the art will understand uponreading this disclosure, the layer of aluminum 321 is used to protectthe copper seed layer 316 from oxidation prior to subsequent processingsteps. The structure is now as appears in FIG. 3D.

FIG. 3E illustrates the structure after the next sequence of processingsteps. As one of ordinary skill in the art will understand upon readingthis disclosure, the residual photoresist layer 312 has served as ablocking layer to define the implant areas for the barrier/adhesionlayer 314, the seed layer 316, and the layer of aluminum 321. Theresidual photoresist layer 312 is now removed using a wet strip process,as the same will be understood by one of ordinary skill in the art uponreading this disclosure. According to the teachings of the presentinvention, removing the residual photoresist layer 312 includes removingthe unwanted aluminum layer 321, the unwanted seed layer 316, and theunwanted barrier/adhesion layer 314 from other areas of the wafer'ssurface, e.g. from over a number of regions outside of the trenches 310on a top surface 319 of the first insulator layer 308. The structure isnow as shown in FIG. 3E.

In FIG. 3F, a metallic conductor 320, or number of first level metallines 320, is deposited over the seed layer 316 in the number oftrenches 310. According to teachings of the present embodiment, themetallic conductor 320, or number of first level metal lines 320, iscopper. In one embodiment, the metallic conductor 320, or number offirst level metal lines 320, is deposited using a selective CVD process.In another embodiment, depositing a metallic conductor 320, or number offirst level metal lines 320, over the seed layer 316 includes depositinga metallic conductor 320 using electroless plating. Electroless copperplating is used to deposit sufficient copper to fill the number oftrenches 310 to a level approximately 100 Å below the top surface 319 ofthe first oxide layer 308. At this point, a second layer of tantalumnitride 323 is deposited to a thickness of approximately 100 Å on thecopper metallic conductor 320, or number of first level copper lines320. A chemical mechanical planarization (CMP) cleanup process is thenused to remove the tantalum nitride from the top surface 319 of thefirst oxide layer 308.

As shown in FIG. 3G, the process sequence may be continued to form anynumber of subsequent metal layers in a multilayer wiring structure. FIG.3G illustrates the structure after the next sequence of processingsteps. In FIG. 3G, a dual damascene process is used to define and fill afirst to a second level of vias and a second level metallurgy. To do so,a second oxide layer 324 is deposited over the wafer surface, e.g. themetallic conductor 320, or number of first level metal lines 320, andthe first oxide layer 308. The second oxide layer 324 is again depositedusing any suitable technique. In one embodiment, depositing a secondoxide layer 324 includes depositing a fluorinated silicon oxide layer324. In one embodiment, the second oxide layer 324 is deposited to havea thickness of approximately 10,000 Å. As one of ordinary skill in theart will understand, upon reading this disclosure, other suitablethickness for the second oxide layer 324 may also be deposited as suitedfor forming a first to a second level of vias, e.g. second level vias,and a number of second level metal lines, the invention is not solimited. The second oxide layer 324 is patterned to define a secondlevel of vias and a number of second level metal lines in the secondoxide layer 324 opening to the metallic conductor 320, or number offirst level metal lines 320. In other words, a second level of vias isdefined in a second mask layer of photoresist 326 and then the secondoxide layer 324 is etched, using any suitable process, e.g. reactive ionetching (RIE), such that a second level of via openings 328 are definedin the second oxide layer 324. Using the dual damascene process, anumber of second level metal lines are also defined in a second masklayer of photoresist 326 and the second oxide layer 324 is again etched,using any suitable process, e.g. reactive ion etching (RIE), such that asecond level of metal line trenches 330 are defined in the oxide. One ofordinary skill in the art will understand upon reading this disclosure,the manner in which a photoresist layer 326 can be mask, exposed, anddeveloped using a dual damascene process to pattern a second level ofvia openings 328 and a second level of metal line trenches 330 in thesecond oxide layer 324.

As described previously, and according to the teachings of the presentinvention, a residual photoresist layer 326 is left in place on thesecond oxide layer 324 in a number of regions 332 outside of the secondlevel of metal line trenches 330. A suitable plasma and/or wet cleaningprocess is used to remove any contaminates from the second level of viaopenings 328 and a second level of metal line trenches 330, as the samewill be understood by one of ordinary skill in the art upon reading thisdisclosure. The structure is now as appears in FIG. 3G.

FIG. 3H illustrates the structure after the next sequence of processingsteps. In FIG. 3H, a second barrier/adhesion layer 334 is deposited inthe second level of via openings 328 and a second level of metal linetrenches 330 using a low energy ion implantation. As described above, inone embodiment according to the teachings of the present invention,depositing the second barrier/adhesion layer 334 includes depositing atantalum nitride layer 334 having a thickness of approximately 5 to 100Å. In alternate embodiments, depositing the second barrier/adhesionlayer 334 includes depositing a second barrier/adhesion layer 334 oftantalum and/or CuTi. In one embodiment, depositing the tantalum nitridelayer 334 includes first depositing a layer of tantalum 383 to have athickness of approximately 100 Å using a low energy ion implantation ofapproximately 100 electron volts (eV) at a varying angle implant (∞),e.g. the angle of implantation (∞) is changed from normal to the wafer'ssurface to approximately 15 degrees off normal as shown by arrows 325.In one embodiment, this is achieved using a 10¹⁷ ion implant oftantalum. Next, according to the teachings of the present invention, alayer of nitrogen 384 is implanted at 700 electron volts (eV) into thelayer of tantalum 383. In one embodiment, this is achieved using an8×10¹⁶ ion implant of nitrogen. As one of ordinary skill in the art willunderstand upon reading this disclosure, using a varying angle implant(∞), where an angle of implantation is changed from normal to thewafer's surface to approximately 15 degrees off normal deposits thesecond barrier/adhesion layer 334 on all surfaces in the second level ofvia openings 328 and in the second level of metal line trenches 330formed in the second oxide layer 324. The structure is now as appears inFIG. 3H.

FIG. 3I illustrates the structure after the next sequence of processingsteps. In FIG. 3I, a second seed layer 336 is deposited on the secondbarrier/adhesion layer 334 using a low energy ion implantation.According to the broader teachings of the present invention, depositingthe second seed layer 336 on the second barrier/adhesion layer 314includes depositing a second seed layer 336 selected from the groupconsisting of aluminum, copper, silver, and gold. However, according tothe teachings of the present embodiment, depositing the second seedlayer 336 includes depositing a second layer of copper 336 having athickness of approximately 50 Å. In one embodiment, this is achievedusing an 8×10¹⁶ ion implant of copper. According to the teachings of thepresent invention, using a low energy ion implantation includesimplanting the layer of copper 336 at 100 electron volts (eV) into thesurfaces of the second level of via openings 328 and the second level ofmetal line trenches 330 in the polymer layer. Also the layer of copper336 is implanted at an angle normal to the wafer's surface as shown byarrows 337. As one of ordinary skill in the art will understand uponreading this disclosure, implanting the layer of copper 336 at an anglenormal to the wafer's surface results in the second seed layer of copper336 remaining on a bottom surface 338 in the second level of viaopenings 328 and to a much lesser extent on the side surfaces 340 of thesecond level of via openings 328 and a second level of metal linetrenches 330. In one embodiment, an optional layer of aluminum 341 isdeposited over the second copper seed layer 336 again using a low energyion implantation of 100 electron volts (eV). The optional layer ofaluminum is deposited to have a thickness of approximately a 50 Å. Inone embodiment, this is achieved using a 3×10¹⁶ ion implant of aluminumnormal to the wafer surface. As one of ordinary skill in the art willunderstand upon reading this disclosure, the layer of aluminum 341 isused to protect the second copper seed layer 336 from oxidation prior tosubsequent processing steps. The structure is now as shown in FIG. 3I.

FIG. 3J illustrates the structure after the next sequence of processingsteps. As one of ordinary skill in the art will understand upon readingthis disclosure, the residual photoresist layer 326 has served as ablocking layer to define the implant areas for the secondbarrier/adhesion layer 334, the second seed layer 336, and the aluminumlayer 341. The residual photoresist layer 326 is now removed using a wetstrip process, as the same will be understood by one of ordinary skillin the art upon reading this disclosure. According to the teachings ofthe present invention, removing the residual photoresist layer 326includes removing the unwanted aluminum layer 341, the unwanted seedlayer 336, and the unwanted barrier/adhesion layer 334 from other areasof the wafer's surface, e.g. from over a number of regions 332 outsideof second level of metal line trenches 330 on a top surface 342 of thesecond insulator layer 324. The structure is now as shown in FIG. 3J.

In FIG. 3K, a second metallic conductor 344, or second core conductor344, is deposited over or formed on the second seed layer 336 and withinthe second barrier/adhesion layer 334 in the second level of viaopenings 328 and the second level of metal line trenches 330 in thepolymer layer. In this embodiment the second metallic conductor 344, orsecond core conductor 344, is copper, but in other embodiments of thepresent invention the second metallic conductor 344, or second coreconductor 344, can be selected from the group consisting of aluminum,silver, and gold. In one embodiment, the second metallic conductor 344,or second core conductor 344, is deposited using a selective CVDprocess. In another embodiment, depositing a second metallic conductor344, or second core conductor 344, over on the second seed layer 336 andwithin the second barrier/adhesion layer 334 includes depositing asecond metallic conductor 344, or second core conductor 344, usingelectroless plating. Electroless copper plating is used to depositsufficient copper to fill the second level of via openings 328 and thesecond level of metal line trenches 330 to level approximately 100 Åbelow the top surface 342 of the second insulator layer 324. At thispoint, a second layer of tantalum nitride 346 is deposited to athickness of approximately 100 Å on the second metallic conductor 344,or second core conductor 344. A chemical mechanical planarization (CMP)cleanup process is then used to remove the tantalum nitride from the topsurface 342 of the second insulator layer 324. Thus, the secondbarrier/adhesion layer 334, the second seed layer 336, and the secondmetallic conductor 344, or second core conductor 344, constitute asecond number of conductive structures which includes a number of secondlevel vias and a number of second level metal lines which are formedover and connect to a first number of conductive structures, e.g. themetallic conductor 320, or number of first level metal lines 320.

Another Embodiment of a Metal Interconnect Using Copper

FIGS. 4A-4L illustrate a novel methodology for the formation of metalinterconnects and/or a wiring structure in an integrated circuitaccording to the teachings of the present invention. The novelmethodology includes the novel formation of a barrier/adhesion layer anda seed layer in an integrated circuit using a low energy ionimplantation. The novel methodology also encompasses a novel method ofmaking copper, silver, aluminum, or gold interconnect for an integratedcircuit.

FIG. 4A illustrates a portion of an integrated circuit structure, namelyan integrated circuit having a number of semiconductor devices formed ina substrate. FIG. 4A illustrates the structure after a device structureis formed in the substrate and the contact structure to the devicestructure is in place. One of ordinary skill in the art will understandupon reading this disclosure the manner in which a number ofsemiconductor structures, e.g. transistors, can be formed in asubstrate. One of ordinary skill in the art will also understand uponreading this disclosure the manner in which a contact structure can beformed connecting to a given semiconductor device in a substrate, suchas described in connection with FIG. 1A. For example, FIG. 4Aillustrates the structure after a number of device structures, e.g.transistor 401A and 401B are formed in the substrate 400. An insulatorlayer 402 is deposited over the number of semiconductors 401A and 401B.The deposition of the insulator layer 402 can include depositing a layerof Si₃N₄ having a thickness in the range of 100 to 500 Angstroms (Å).This insulator layer will also serve as an additional barrier toimpurities coming from subsequent processing steps. Contact holes 405Aand 405B are opened to the number of device structures 401A and 401Busing a photolithography technique. One of ordinary skill in the arewill understand, upon reading this disclosure, the manner in which aphotolithography technique can be used to create contact holes 405A and405B. In one embodiment of the present invention a titanium silicideliner 406A and 406B is placed in the contact holes 405A and 405B, such athrough a process such as chemical vapor deposition (CVD). Next,tungsten vias 407A and 407B can be deposited in the contact holes 405Aand 405B. The tungsten vias 407A and 407B can be deposited in thecontact holes using any suitable technique such as using a CVD process.The excess tungsten is then removed from the wafer surface by chemicalmechanical planarization (CMP) or other suitable processes to form aplanarized surface 409.

As shown in FIG. 4B, a first polymer layer 408, or first layer ofpolyimide 408, is deposited over the wafer surface. The first polymerlayer 408 may be deposited using, for example, the process and materialdescribed in co-pending and commonly assigned application U.S. Ser. No.09/128,859, entitled “Copper Metallurgy in Integrated Circuits,” whichis hereby incorporated by reference. In one embodiment, depositing afirst polymer layer 408 includes depositing a foamed polymer layer 408.In one embodiment, the first layer of polyimide 408 is deposited andcured, forming a 5000 Å thick layer of polymer 408 after curing. As oneof ordinary skill in the art will understand, upon reading thisdisclosure, other suitable thickness for the first layer of polyimide408, or insulator layer/material 408, may also be deposited as suitedfor forming a first level metal pattern, the invention is not solimited. The first layer of polyimide 408, or first insulatorlayer/material 408 is patterned to define a number of trenches 410 inthe first insulator layer 408 opening to a number of first level vias,e.g. tungsten vias 407A and 407B in planarized surface 409. In otherwords, a first level metal pattern 410 is defined in a mask layer ofphotoresist 412 and then the first layer of polyimide 408 is etched,using any suitable process, e.g. reactive ion etching (RIE), such thatthe first level metal pattern 410 is defined in the polyimide. Accordingto the teachings of the present invention, a residual photoresist layer412 is left in place on the first insulator layer 408 in a number ofregion 413 outside of the number trenches 410. The structure is now asappears in FIG. 4B.

As shown in FIG. 4C, a first barrier/adhesion layer 414 is deposited inthe number of trenches 410 using a low energy ion implantation. In oneembodiment according to the teachings of the present invention,depositing the barrier/adhesion layer 414 includes depositing a layer ofzirconium 414 having a thickness of approximately 5 to 100 Å. Inalternate embodiments, depositing the barrier/adhesion layer 414includes depositing a barrier/adhesion layer 414 of titanium and/orhafnium. In one embodiment, depositing the depositing a layer ofzirconium 414 includes depositing a layer of zirconium 414 having athickness of approximately 15 Å. This can be achieved using a 10¹⁷ ionimplant of zirconium. According to the teachings of the presentinvention, the layer of zirconium 414 is implanted at 100 electron volts(eV) into the surface of the trenches 410 in the polymer layer 408 usingan angle of implant normal to the wafer's surface as shown by arrows411. The structure is now as appears in FIG. 4C.

In FIG. 4D, a first seed layer 416 is deposited on the firstbarrier/adhesion layer 414 using a low energy ion implantation.According to the broader teachings of the present invention, depositingthe seed layer 416 on the barrier/adhesion layer 414 includes depositinga seed layer 416 selected from the group consisting of aluminum, copper,silver, and gold. However, according to the teachings of the presentembodiment, depositing the seed layer 416 includes depositing a layer ofcopper 416 having a thickness of approximately a 50 Å. This can beachieved using an 8×10¹⁶ ion implant of copper. According to theteachings of the present invention, using a low energy ion implantationincludes implanting the layer of copper 416 at 100 electron volts (eV)into the surface of the trenches 410 in the polymer layer. Also thelayer of copper 416 is implanted at an angle normal to the wafer'ssurface as shown by arrows 415. As one of ordinary skill in the art willunderstand upon reading this disclosure, implanting the layer of copper416 at an angle normal to the wafer's surface results in the seed layerof copper 416 remaining on a bottom surface 418 in the number oftrenches 410 and to a much lesser extent on the side surfaces 420 of thenumber of trenches 410. In one embodiment, an optional layer of aluminum421 is deposited over the copper seed layer 416 again using a low energyion implantation of 100 electron volts (eV). The optional layer ofaluminum 421 is deposited to have a thickness of approximately a 50 Å.This can be achieved using a 3×10¹⁶ ion implant of aluminum normal tothe wafer surface as shown by arrows 415. As one of ordinary skill inthe art will understand upon reading this disclosure, the layer ofaluminum 421 is used to protect the copper seed layer 416 from oxidationprior to subsequent processing steps. The structure is now as appears inFIG. 4D.

FIG. 4E illustrates the structure after the next sequence of processingsteps. As one of ordinary skill in the art will understand upon readingthis disclosure, the residual photoresist layer 412 has served as ablocking layer to define the implant areas for the barrier/adhesionlayer 414, the seed layer 416, and the layer of aluminum 421. Theresidual photoresist layer 412 is now removed using a wet strip process,as the same will be understood by one of ordinary skill in the art uponreading this disclosure. According to the teachings of the presentinvention, removing the residual photoresist layer 412 includes removingthe unwanted aluminum layer 421, the unwanted seed layer 416, and theunwanted barrier/adhesion layer 414 from other areas of the wafer'ssurface, e.g. from over a number of regions 413 outside of the trenches410 on a top surface 419 of the first insulator layer 408. The structureis now as shown in FIG. 4E.

In FIG. 4F, a metallic conductor 420, or number of first level metallines 420, is deposited over the seed layer 416 in the number oftrenches 410. According to teachings of the metallic conductor 420, ornumber of first level metal lines 420, is selected from the groupconsisting of aluminum, copper, silver, and gold depending on the typeof seed layer 416 which was deposited. According to this embodiment, anumber of copper metal lines 420, or first level copper metal lines 420are selectively formed on the copper seed layer 416. In one embodiment,the metallic conductor 420, or number of first level metal lines 420, isdeposited using a selective CVD process. In another embodiment,depositing a metallic conductor 420, or number of first level metallines 420, over the seed layer 416 includes depositing a metallicconductor 420 using electroless plating. Electroless copper plating isused to deposit sufficient copper to fill the number of trenches 410 tothe top surface 419 of the first insulator layer 408.

As shown in FIG. 4G, the process sequence may be continued to form anynumber of subsequent metal layers in a multilayer wiring structure. FIG.4G illustrates the structure after the next sequence of processingsteps. In FIG. 4G, a dual damascene process is used to define and fill afirst to a second level of vias and a second level metallurgy. To do so,a second polymer layer 424, or second layer of polyimide 424, isdeposited over the wafer surface, e.g. the metallic conductor 420, ornumber of first level metal lines 420, and the first polymer layer 408.The second polymer layer 424 may similarly be deposited using, forexample, the process and material described in co-pending and commonlyassigned application U.S. Ser. No. 09/128,859, entitled “CopperMetallurgy in Integrated Circuits,” which is hereby incorporated byreference. In one embodiment, depositing a second polymer layer 424includes depositing a foamed second polymer layer 424. In oneembodiment, the second polymer layer 424 is deposited and cured, forminga 10,000 Å thick second polymer layer 424 after curing. As one ofordinary skill in the art will understand, upon reading this disclosure,other suitable thickness for the second polymer layer 424, or secondinsulator layer/material 424, may also be deposited as suited forforming a first to a second level of vias, e.g. second level vias, and anumber of second level metal lines, the invention is not so limited. Thesecond polymer layer 424, or second insulator layer/material 424 ispatterned to define a second level of vias and a number of second levelmetal lines in the second insulator layer/material 424 opening to themetallic conductor 420, or number of first level metal lines 420. Inother words, a second level of vias is defined in a second mask layer ofphotoresist 426 and then the second polymer layer 424 is etched, usingany suitable process, e.g. reactive ion etching (RIE), such that asecond level of via openings 428 are defined in the polyimide. Using thedual damascene process, a number of second level metal lines are alsodefined in a second mask layer of photoresist 426 and the second polymerlayer 424 is again etched, using any suitable process, e.g. reactive ionetching (RIE), such that a second level of metal line trenches 430 aredefined in the polyimide. One of ordinary skill in the art willunderstand upon reading this disclosure, the manner in which aphotoresist layer 426 can be mask, exposed, and developed using a dualdamascene process to pattern a second level of via openings 428 and asecond level of metal line trenches 430 in the second insulatorlayer/material 424.

As described previously, and according to the teachings of the presentinvention, a residual photoresist layer 426 is left in place on thesecond insulator layer/material 424 in a number of regions 432 outsideof the second level of metal line trenches 430. A suitable plasma and/orwet cleaning process is used to remove any contaminates from the secondlevel of via openings 428 and a second level of metal line trenches 430,as the same will be understood by one of ordinary skill in the art uponreading this disclosure. The structure is now as appears in FIG. 4G.

FIG. 4H illustrates the structure after the next sequence of processingsteps. In FIG. 4H, a second barrier/adhesion layer 434 is deposited inthe second level of via openings 428 and a second level of metal linetrenches 430 using a low energy ion implantation. As described above, inone embodiment according to the teachings of the present invention,depositing the second barrier/adhesion layer 434 includes depositing alayer of zirconium 434 having a thickness of approximately 5 to 100 Å.In alternate embodiments, depositing the second barrier/adhesion layer434 includes depositing a barrier/adhesion layer 434 of titanium and/orhafnium. In one embodiment, depositing the layer of zirconium 434includes depositing a layer of zirconium 434 having a thickness ofapproximately 15 Å. In one embodiment, this is achieved using a 10¹⁷ ionimplant of zirconium. According to the teachings of the presentinvention, the layer of zirconium 434 is implanted at 100 electron volts(eV) into the surface of the second level of via openings 428 and asecond level of metal line trenches 430 in the second polymer layer 424using an implant angle normal to the wafer's surface as shown by arrows425. The structure is now as appears in FIG. 4H.

FIG. 4I illustrates the structure after the next sequence of processingsteps. In FIG. 4I, a second seed layer 436 is deposited on the secondbarrier/adhesion layer 434 using a low energy ion implantation.According to the broader teachings of the present invention, depositingthe second seed layer 436 on the second barrier/adhesion layer 414includes depositing a second seed layer 436 selected from the groupconsisting of aluminum, copper, silver, and gold. However, according tothe teachings of the present embodiment, depositing the second seedlayer 436 includes depositing a second layer of copper 436 having athickness of approximately a 50 Å. In one embodiment, this is achievedusing an 8×10¹⁶ ion implant of copper. According to the teachings of thepresent invention, using a low energy ion implantation includesimplanting the layer of copper 436 at 100 electron volts (eV) into thesecond level of via openings 428 and the second level of metal linetrenches 430 in the polymer layer. Also the layer of copper 436 isimplanted at an angle normal to the wafer's surface as shown by arrows437. As one of ordinary skill in the art will understand upon readingthis disclosure, implanting the layer of copper 436 at an angle normalto the wafer's surface results in the second seed layer of copper 436remaining on a bottom surface 438 in the second level of via openings428 and to a much lesser extent on the side surfaces 440 of the secondlevel of via openings 428 and a second level of metal line trenches 430.In one embodiment, an optional layer of aluminum 441 is deposited overthe second copper seed layer 436 again using a low energy ionimplantation of 100 electron volts (eV). The optional layer of aluminumis deposited to have a thickness of approximately a 50 Å. In oneembodiment, this is achieved using a 3×10¹⁶ ion implant of aluminumnormal to the wafer surface. As one of ordinary skill in the art willunderstand upon reading this disclosure, the layer of aluminum 441 isused to protect the second copper seed layer 436 from oxidation prior tosubsequent processing steps. The structure is now as appears in FIG. 4I.

FIG. 4J illustrates the structure after the next sequence of processingsteps. As one of ordinary skill in the art will understand upon readingthis disclosure, the residual photoresist layer 426 has served as ablocking layer to define the implant areas for the secondbarrier/adhesion layer 434, the second seed layer 436, and the aluminumlayer 441. The residual photoresist layer 426 is now removed using a wetstrip process, as the same will be understood by one of ordinary skillin the art upon reading this disclosure. According to the teachings ofthe present invention, removing the residual photoresist layer 426includes removing the unwanted aluminum layer 441, the unwanted seedlayer 436, and the unwanted barrier/adhesion layer 434 from other areasof the wafer's surface, e.g. from over a number of regions 432 outsideof second level of metal line trenches 430 on a top surface 442 of thesecond insulator layer 424. The structure is now as shown in FIG. 4J.

In FIG. 4K, a second metallic conductor 444, or second core conductor444, is deposited over or formed on the second seed layer 436 and withinthe second barrier/adhesion layer 434 in the second level of viaopenings 428 and the second level of metal line trenches 430 in thepolymer layer. In this embodiment the second metallic conductor 444, orsecond core conductor 444, is copper, but in other embodiments of thepresent invention the second metallic conductor 444, or second coreconductor 444, can be selected from the group consisting of aluminum,silver, and gold. In one embodiment, the second metallic conductor 444,or second core conductor 444, is deposited using a selective CVDprocess. In another embodiment, depositing a second metallic conductor444, or second core conductor 444, over on the second seed layer 436 andwithin the second barrier/adhesion layer 434 includes depositing asecond metallic conductor 444, or second core conductor 444, usingelectroless plating. Electroless copper plating is used to depositsufficient copper to fill the second level of via openings 428 and thesecond level of metal line trenches 430 to the top surface 442 of thesecond insulator layer 424. Thus, the second barrier/adhesion layer 434,the second seed layer 436, and the second metallic conductor 444, orsecond core conductor 444, constitute a second number of conductivestructures which includes a number of second level vias and a number ofsecond level metal lines which are formed over and connect to a firstnumber of conductive structures, e.g. the metallic conductor 420, ornumber of first level metal lines 420.

As one of ordinary skill in the art will understand upon reading thisdisclosure, the above described method embodiments can be repeated untilthe requisite number of metal layers are formed.

FIG. 4L illustrates the structure following the final sequence ofprocessing steps. Upon completion of the last level of metal, the entirepolymer structure, e.g. first polymer layer 408 and second polymer layer424, are removed using an O₂ plasma etch. The structure is now asappears in FIG. 4L.

FIG. 5, is an illustration of an embodiment of an integrated circuitformed according to the teachings of the present invention. As shown inFIG. 5, the integrated circuit includes a metal layer in an integratedcircuit. The metal layer FIG. 5, is an illustration of an embodiment ofan integrated circuit 503 formed according to the teachings of thepresent invention. As shown in FIG. 5, the integrated circuit 503includes a metal layer in an integrated circuit. The metal layerincludes a number of first level vias 507A and 507B connecting to anumber of silicon devices 501A and 501B in a substrate 500. A number offirst level metal lines 520 are formed above and connect to the numberof first level vias 507A and 507B. A barrier/adhesion layer 514 having athickness in the range of 5 to 150 Angstroms is formed on the number offirst level vias 507A and 507B. A seed layer 516 having a thickness inthe range of 5 to 150 Angstroms is formed at least between a portion ofthe barrier/adhesion layer 514 and the number of first level metal lines520. As described above the barrier adhesion layer 514 having athickness in the range of 5 to 150 Angstroms includes a barrier/adhesionlayer selected from the group consisting of titanium, zirconium, andhafnium. In one embodiment, as shown in FIG. 5, the number of firstlevel vias 507A and 507B connecting to a number of silicon devices 501Aand 501B in substrate 500 are surrounded by an insulator layer 502.

As described above the number of first level metal lines is selectedfrom the group consisting of Aluminum, Copper, Silver, and Gold. In oneembodiment, the integrated circuit 503 comprises a portion of anintegrated memory circuit 503. In this embodiment, the number of silicondevices 501A and 501B includes one or more transistors 501A and 501B inthe substrate 500.

As one of ordinary skill in the art will understand upon reading thisdisclosure, any one of the embodiments as shown in FIGS. 1K, 2K, 3K,and/or 4L can comprise a portion of an integrated circuit according tothe teachings of the present invention.

FIG. 6 illustrates an embodiment of a system 600 including a portion ofan integrated circuit formed according to any of the embodimentsdescribed in the present application. As one of ordinary skill in theart will understand upon reading this disclosure, this system 600includes a processor 610 and an integrated circuit, or integrated memorycircuit 630 coupled to the processor 610. The processor 610 can becoupled to the integrated memory circuit 630 via any suitable bus, asthe same are known and understood by one of ordinary skill in the art.In the embodiment, the processor 610 and integrated circuit 630 arelocated on a single wafer or die. Again, at least a portion of theintegrated circuit 630 includes a portion of an integrated circuit 603as disclosed in the various embodiments provided herein.

CONCLUSION

Thus, structures and methods have been provided which improve theperformance of integrated circuits according to shrinking design rules.The structures and methods include a diffusion barrier and a seed layerin an integrated circuit both formed using a low energy ion implantationfollowed by a selective deposition of metal lines for the integratedcircuit. According to the teachings of the present invention, theselective deposition of the metal lines avoids the need for multiplechemical mechanical planarization (CMP) steps. The low energy ionimplantation of the present invention allows for the distinct placementof both the diffusion barrier and the seed layer. A residual resist canbe used to remove the diffusion barrier and the seed layer from unwantedareas on a wafer surface. The structures formed by the described novelprocesses accommodate aluminum, copper, gold, and silver metalinterconnects.

Although specific embodiments have been illustrated and describedherein, it will be appreciated by those of ordinary skill in the artthat any arrangement which is calculated to achieve the same purpose maybe substituted for the specific embodiment shown. This application isintended to cover any adaptations or variations of the presentinvention. It is to be understood that the above description is intendedto be illustrative, and not restrictive. The scope of the inventionincludes any other applications in which the above structures andfabrication methods are used. The scope of the invention should bedetermined with reference to the appended claims, along with the fullscope of equivalents to which such claims are entitled.

1. An electronic apparatus comprising: a first insulating layer above asubstrate, the substrate including an electronic device; a firstbarrier/adhesion layer on and contacting the first insulating layer, thefirst insulating layer including a conductive path within the firstinsulating layer such that the first barrier/adhesion layer isconductively coupled to the electronic device, the firstbarrier/adhesion layer being a conductive layer; a first seed layer onand contacting the first barrier/adhesion layer; a first conductive lineon the first seed layer; a second barrier/adhesion layer on andconductively coupled to the first conductive line, the secondbarrier/adhesion layer being a conductive layer; a second seed layer onand contacting the second barrier/adhesion layer; and a secondconductive line on the second seed layer.
 2. The electronic apparatus ofclaim 1, wherein the first conductive layer has sidewalls extendingvertically above the seed layer, the sidewalls in contact with thesecond barrier/adhesion layer.
 3. The electronic apparatus of claim 1,wherein the first barrier/adhesion layer is conductively coupled toanother electronic device in the substrate
 4. The electronic apparatusof claim 1, wherein the first barrier/adhesion layer includes titanium,zirconium, hafnium, or a combination of two or more of titanium,zirconium, or hafnium.
 5. The electronic apparatus of claim 1, whereinthe first seed layer is formed of multiple conductive layers, the firstseed layer containing at least two different metals.
 6. An electronicapparatus comprising: a first insulating layer above a substrate, thesubstrate including a first electronic device and a second electronicdevice; a first barrier/adhesion layer on and contacting the firstinsulating layer, the first insulating layer including conductive pathswithin the first insulating layer such that the first barrier/adhesionlayer is conductively coupled to the first electronic device and to thesecond electronic device, the first barrier/adhesion layer being aconductive layer; a first seed layer on and contacting the firstbarrier/adhesion layer; a first conductive line on the first seed layer;a conductive capping layer on and contacting the first conductive line;a second barrier/adhesion layer on and contacting the conductive cappinglayer such that the second barrier/adhesion layer is disposed on andconductively coupled to the first conductive line, the secondbarrier/adhesion layer being a conductive layer; a second seed layer onand contacting the second barrier/adhesion layer; a second conductiveline on the second seed layer; a third barrier/adhesion layer on andcontacting the conductive capping layer such that the thirdbarrier/adhesion layer is disposed on and conductively coupled to thefirst conductive line, the third barrier/adhesion layer being aconductive layer; a third seed layer on and contacting the thirdbarrier/adhesion layer; a third conductive line on the third seed layer;and an insulating region separating the second barrier/adhesion layerfrom the third barrier/adhesion layer.
 7. The electronic apparatus ofclaim 6, wherein the insulating region comprises a polymer.
 8. Theelectronic apparatus of claim 6, wherein the first conductive linecomprises copper.
 9. The electronic apparatus of claim 6, wherein theseed layer comprises aluminum
 10. The electronic apparatus of claim 6,wherein the electronic apparatus comprises an integrated memory circuitin which the conductive lines are disposed.
 11. An electronic apparatuscomprising: a first insulating layer above a substrate, the substrateincluding an electronic device; a first barrier/adhesion layer having abottom surface on and contacting the first insulating layer, the firstinsulating layer including a conductive path within the first insulatinglayer such that the first barrier/adhesion layer is conductively coupledto the electronic device, the first barrier/adhesion layer being aconductive layer, the first barrier/adhesion layer having a sidewallextending vertically from the bottom surface; a first seed layer on andcontacting the first barrier/adhesion layer; a first conductive line onthe first seed layer; a second barrier/adhesion layer on andconductively coupled to the first conductive line, the secondbarrier/adhesion layer being a conductive layer, the secondbarrier/adhesion layer having a sidewall extending vertically from a toplevel of the first conductive layer to a level at which the secondbarrier/adhesion layer has an outward extension that extends outwardlyfrom the sidewall at the level, the outward extension of the secondbarrier/adhesion layer vertically separated from the first insulatinglayer by an opening; a second seed layer on and contacting the secondbarrier/adhesion layer; and a second conductive line on the second seedlayer.
 12. The electronic apparatus of claim 11, wherein the sidewall ofthe barrier/adhesion layer contacts the second barrier/adhesion layer.13. The electronic apparatus of claim 11, wherein a conductive metallayer is disposed on and in contact with the first seed layer, theconductive metal layer in contact with the first conductive line. 14.The electronic apparatus of claim 11, the electronic apparatuscomprises: a third barrier/adhesion layer on and conductively coupled tothe first conductive line, the third barrier/adhesion layer being aconductive layer, the third barrier/adhesion layer having a sidewallextending vertically from a top level of the first conductive layer to alevel at which the third barrier/adhesion layer has an outward extensionthat extends outwardly from the sidewall at the level, the outwardextension of the third barrier/adhesion layer vertically separated fromthe first insulating layer by an opening; a third seed layer on andcontacting the third barrier/adhesion layer; and a third conductive lineon and contacting the second seed layer.
 15. The electronic apparatus ofclaim 14, the second barrier/adhesion layer is separated from the thirdbarrier/adhesion layer by an opening.
 16. A method comprising: forming afirst insulating layer above a substrate, the substrate including anelectronic device; forming a first barrier/adhesion layer on andcontacting the first insulating layer with the first insulating layerhaving a conductive path within the first insulating layer such that thefirst barrier/adhesion layer is conductively coupled to the electronicdevice, the first barrier/adhesion layer being a conductive layer;forming a first seed layer on and contacting the first barrier/adhesionlayer; forming a first conductive line on the first seed layer; forminga second barrier/adhesion layer on and conductively coupled to the firstconductive line, the second barrier/adhesion layer being a conductivelayer; forming a second seed layer on and contacting the secondbarrier/adhesion layer; and forming a second conductive line on thesecond seed layer.
 17. The method of claim 16, wherein forming a firstbarrier/adhesion layer comprises forming the first barrier/adhesionlayer using an ion implantation with an ion implantation energy rangebetween 100 eV and 800 eV.
 18. The method of claim 16, furthercomprising: forming a polymer layer on the first insulating layer;forming an trench in the polymer layer; and forming the firstbarrier/adhesion layer, the first seed layer, and first conductive linein the trench.
 19. The method of claim 16, further comprising: forming aconductive capping layer on the first conductive line; and forming thesecond barrier/adhesion layer on and contacting the conductive cappinglayer.
 20. The method of claim 16, forming a first seed layer comprisesforming multiple conductive layers.
 21. A method comprising: forming afirst insulating layer above a substrate, the substrate including anelectronic device; forming a first barrier/adhesion layer having abottom surface on and contacting the first insulating layer, the firstinsulating layer including a conductive path within the first insulatinglayer such that the first barrier/adhesion layer is conductively coupledto the electronic device, the first barrier/adhesion layer being aconductive layer, the first barrier/adhesion layer having a sidewallextending vertically from the bottom surface; forming a first seed layeron and contacting the first barrier/adhesion layer; forming a firstconductive line on the first seed layer; forming a secondbarrier/adhesion layer on and conductively coupled to the firstconductive line, the second barrier/adhesion layer being a conductivelayer, the second barrier/adhesion layer having a sidewall extendingvertically from a top level of the first conductive layer to a level atwhich the second barrier/adhesion layer has an outward extension thatextends outwardly from the sidewall at the level, the outward extensionof the second barrier/adhesion layer vertically separated from the firstinsulating layer by an opening; forming a second seed layer on andcontacting the second barrier/adhesion layer; and forming a secondconductive line on the second seed layer.
 22. The method of claim 21,further comprising: forming a second insulating layer on the firstinsulating layer; forming a first trench in the second insulating layer;and forming the first barrier/adhesion layer, the first seed layer, andfirst conductive line in the trench; forming a third insulating layer onthe second insulating layer and on the first conductive line; forming asecond trench in the second insulating layer in which the secondbarrier/adhesion layer, the second seed layer, and second conductiveline are formed with the outward extension of the secondbarrier/adhesion layer on the second insulating layer; and applying aplasma etch to remove portions of the second insulating layer and thirdinsulating to form the opening separating the second barrier/adhesionlayer from the first insulating layer.
 23. The method of claim 22,wherein forming the second insulating layer comprises forming apolyimide layer.
 24. The method of claim 21, further comprising: forminga second insulating layer on the first conductive line; forming a firsttrench in the second insulating layer in which the secondbarrier/adhesion layer, the second seed layer, and the second conductiveline are formed; forming a second trench in the second insulating layer;forming, in the second trench, a third barrier/adhesion layer on andconductively coupled to the first conductive line, the thirdbarrier/adhesion layer being a conductive layer, the thirdbarrier/adhesion layer having a sidewall extending vertically from a toplevel of the first conductive line to a level at which the thirdbarrier/adhesion layer has an outward extension that extends outwardlyfrom the sidewall at the level; forming, in the second trench, a thirdseed layer on and contacting the third barrier/adhesion layer; forming athird conductive line on and contacting the third seed layer; andapplying a plasma etch to remove a portion of the second insulatinglayer to form an opening between the second barrier/adhesion layer andthe third barrier/adhesion layer.
 25. The method of claim 24, whereinforming the second insulating layer comprises forming a foamed polymerlayer.